Hightec Systems is a premier source in selling and buying used parts of semiconductor manufacturing equipment/
liquid crystal manufacturing equipment/used equipment as well as selling ALD equipment.

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For inquiries, please fill in the necessary items below,read "Personal Information Protection Policy"and then proceed to the"confirmation page".
※Please make sure to fill in the blanks that are marked as [Required].

Please note that we may not be able to respond to some questions by email.

Inquiry Product

Product Code Control No. Product Name Model
17454 JM002P-0178 SPEED CONTROL MOTOR MBM540-412
38631 BD001-0059 INDUCTION MOTOR BHI62ST-G2
14073 JA058P-004 DC POWER SUPPLY EWS300-24
14083 JA058P-015 RS-232-C UNIT A1SJ71UC24-R2
41479 BG002-0315 CARD APC DAVGHTEL 0660-01398
109612 FY002-0113 RELAY H-DO-D-D
14067 JA057P-034 DC POWER SUPPLY PSR-H50
30030 AQ001-0688 INPUT UNIT AX42
14080 JA058P-012 OUTPUT UNIT A1SY41
80643 CY001-0020 AC SERVO AMPLIFIER MR-J4-10A
14076 JA058P-008 CPU UNIT A2USCPU-S30
14074 JA058P-005 POWER SUPPLY UNIT A1S61P
14078 JA058P-010 INPUT UNIT A1SX41
14082 JA058P-014 OUTPUT UNIT A1SY10
32001 AR001-1020 POWER SUPPLY UNIT Q61P
14063 JA057P-030 OUTPUT UNIT AY42
30029 AQ001-0687 INPUT UNIT AX42
15039 JA139P-001 POWER SUPPLY UNIT A1S61P
14062 JA057P-029 INPUT UNIT AX40
30034 AQ001-0692 INPUT UNIT AX42
32002 AR001-1021 POWER SUPPLY UNIT Q61P
38683 BD001-0111 AC SERVO AMPLIFIER MR-J3-10B
3865 1TA1-9030 NON-EXCITED BRAKE BXM-04-10-A-6
80668 CY001-0045 AC SERVO AMPLIFIER MR-J4-10A
92398 190203-128 ISS SENSOR(DETECTOR) ISS SENSOR(DETECTOR)
38596 BD001-0024 INDUCTION MOTOR 2IK6GN-SW2B
38644 BD001-0072 REGENERATIVE OPTION MR-RB12
41481 BG002-0317 CARD APC DAVGHTEL 0660-01398
30027 AQ001-0685 INPUT UNIT AX42
92397 190203-127 反射率モニタ用ハーフミラー 反射率モニタ用ハーフミラー
41478 BG002-0314 CARD APC DAVGHTEL 0660-01398
31999 AR001-1018 POWER SUPPLY UNIT Q61P
38748 BD001-0176 AC SERVO AMPLIFIER MR-J3-70B
7573 AA002-0031 SERVO PACK SGDV-R90A05A
319F 118 POWER SUPPLY UNIT C200HW-PA204S
92393 190203-123 FLY EYE LENS FLY EYE LENS
30039 AQ001-0697 INPUT UNIT AX42
32003 AR001-1022 POWER SUPPLY UNIT Q61P
92383 190203-113 BLIND BLIND
14053 JA057P-020 DC POWER SUPPLY EWS300-24
14045 JA057P-011 RS-232-C UNIT A1SJ71UC24-R2
32005 AR001-1024 POWER SUPPLY UNIT Q61P
38597 BD001-0025 INDUCTION MOTOR 2IK6GN-SW2B
38688 BD001-0116 AC SERVO AMPLIFIER MR-J3-70B
32008 AR001-1027 POWER SUPPLY UNIT Q61P
41480 BG002-0316 CARD APC DAVGHTEL 0660-01398
41482 BG002-0318 CARDAPC DIGITAL I/O GENELIC 2OUT 0660-01571
41465 BG002-0301 ANALOG OUTPUT BOARD 0660-01513
32006 AR001-1025 POWER SUPPLY UNIT Q61P
92395 190203-125 TARGET HALF MIRROR TARGET HALF MIRROR
15042 JA139P-004 INPUT UNIT A1SX42
30028 AQ001-0686 INPUT UNIT AX42
15040 JA139P-002 CPU UNIT A2USCPU
41476 BG002-0312 TEMP MONITOR 0100-66002 REV E4
30026 AQ001-0684 INPUT UNIT AX42
41487 BG002-0323 CARDAPC DIGITAL I/O GENELIC 21N 0660-01572
15043 JA139P-006 RS-232-C UNIT A1SJ71UC24-R2
32007 AR001-1026 POWER SUPPLY UNIT Q61P
38743 BD001-0171 AC SERVO AMPLIFIER MR-J3-40B
92388 190203-118 反射率モニタ 反射率モニタ
14046 JA057P-012 DATA LINK UNIT A1SJ71AP21
92402 190203-132 PA OPTICAL FIBER PA OPTICAL FIBER
7574 AA002-0032 SERVO PACK SGDS-20A15A
7568 AA002-0026 AC SERVO DRIVER MFDDTA390
30031 AQ001-0689 INPUT UNIT AX42
15036 JA138P-007 RS-232-C UNIT A1SJ71UC24-R2
14040 JA057P-004 CPU UNIT A2USCPU-S30
7571 AA002-0029 AC SERVO DRIVER MBDDT2210
41488 BG002-0324 CARDAPC DIGITAL I/O GENELIC 21N 0660-01572
38745 BD001-0173 AC SERVO AMPLIFIER MR-J3-40B
32918 AR001-1937 CC-LINK MASTER UNIT QJ61BT11N
80675 CY001-0052 AC SERVO AMPLIFIER MR-J4-10A
3874 1TA1-9041 SERVO PACK SGD-02BH
14048 JA057P-014 INVERTER J100-015LF2
14041 JA057P-006 INPUT UNIT A1SX41
14047 JA057P-013 INVERTER J100-004LF2
30032 AQ001-0690 INPUT UNIT AX42
32004 AR001-1023 POWER SUPPLY UNIT Q61P
38747 BD001-0175 AC SERVO AMPLIFIER MR-J3-70B
8067 AA002-0535 SERVO PACK SGDV-330A05A
7567 AA002-0025 AC SERVO DRIVER MFDDTB3A2
14051 JA057P-018 INVERTER WJ200-015LF
80672 CY001-0049 AC SERVO AMPLIFIER MR-J4-10A
75749 CW001-0005 BS SERVO MOTOR VLBSV-45030-K
7566 AA002-0024 SERVO PACK SGDV-120A05A
32013 AR001-1032 POWER SUPPLY UNIT Q61P
32015 AR001-1034 POWER SUPPLY UNIT Q61P
92396 190203-126 積算露光量センサ用ハーフミラー 積算露光量センサ用ハーフミラー
14050 JA057P-016 INVERTER J100-037LF2
92389 190203-119 DICHROIC MIRROR(BACK) DICHROIC MIRROR(BACK)
55566 CO001-4924 FIBER SENSOR AMPLIFIER FX-305
15048 JA139P-011 2軸位置決ユニット E-20GM
15065 JA140P-011 MOTION CONTROLLER A222AM-20
32019 AR001-1038 POWER SUPPLY UNIT Q61P
92378 190203-108 UV LAMP CONTROLLER UU-0045-A
30043 AQ001-0701 INPUT UNIT AX42
32014 AR001-1033 POWER SUPPLY UNIT Q61P
15067 JA140P-013 MOTION CONTROLLER A278LX
7570 AA002-0028 AC SERVO DRIVER MDDDT5540
30033 AQ001-0691 INPUT UNIT AX42
41475 BG002-0311 EXHAUST SWITCHING 0100-66014 REV E2
30035 AQ001-0693 INPUT UNIT AX42
80673 CY001-0050 AC SERVO AMPLIFIER MR-J4-10A
32017 AR001-1036 POWER SUPPLY UNIT Q61P
7572 AA002-0030 AC SERVO DRIVER MADDT1205
30037 AQ001-0695 INPUT UNIT AX42
40021 BF001-0284 AC SERVO MOTOR SGMP-15AWYR21
40029 BF001-0292 STEPPING MOTOR PK266-02B
109595 FY002-0096 RELAY H-TIO-B-FK09-V*NN
80669 CY001-0046 AC SERVO AMPLIFIER MR-J4-10A
92385 190203-115 ISS SHUTTER ISS SHUTTER
30045 AQ001-0703 INPUT UNIT AX42
92392 190203-122 2 RELAY LENS 2 RELAY LENS
15045 JA139P-008 I/O UNIT A1SH42
50940 CO001-0298 GEAR HEAD K9005R B
38632 BD001-0060 INDUCTION MOTOR BHI62ST-G2
80671 CY001-0048 AC SERVO AMPLIFIER MR-J4-10A
50174 CP001-0506 AREA SENSOR PJ-F41R
50178 CP001-0510 AREA SENSOR PJ-F41T
15044 JA139P-007 DATA LINK UNIT A1SJ71AR21
41489 BG002-0325 DAUGHTER BOARD 0660-01410
40030 BF001-0293 STEPPING MOTOR PK266-02B
92391 190203-121 1 RELAY LENS 1 RELAY LENS
7569 AA002-0027 AC SERVO DRIVER MCDDT3520
106775 FM001-0959 D/A CONVERTER UNIT AJ65BT-64DAV
32009 AR001-1028 POWER SUPPLY UNIT Q61P
32812 AR001-1831 I/O UNIT QH42P
106752 FM001-0936 POWER SUPPLY UNIT Q61P-A1
3281 130804-1-012 OUTPUT UNIT AY10
50173 CP001-0505 AREA SENSOR PJ-F41R
32010 AR001-1029 POWER SUPPLY UNIT Q61P
4003 1TA5-0005 STEPPING MOTOR EM596-NAE
30040 AQ001-0698 INPUT UNIT AX42
40023 BF001-0286 MOTOR Α1/3000
32921 AR001-1940 CC-LINK MASTER UNIT QJ61BT11N
106746 FM001-0930 CPU UNIT Q25HCPU
106776 FM001-0960 D/A CONVERTER UNIT AJ65BT-64DAV
40027 BF001-0290 STEPPING MOTOR PK566BW
106750 FM001-0934 POWER SUPPLY UNIT Q61P-A1
106751 FM001-0935 POWER SUPPLY UNIT Q61P-A1
38634 BD001-0062 GEAR HEAD BH6G2-30RH
30038 AQ001-0696 INPUT UNIT AX42
55565 CO001-4923 FIBER SENSOR AMPLIFIER FX-305
92379 190203-109 PL ROTATION MOTOR RS0810FN540
80680 CY001-0057 AC SERVO AMPLIFIER MR-J4-10A
40022 BF001-0285 AC SERVO MOTOR SGMP-08AWYR21
80667 CY001-0044 AC SERVO AMPLIFIER MR-J4-10A
30041 AQ001-0699 INPUT UNIT AX42
39999 BF001-0262 AC SERVO DRIVER KBLD120-C
38633 BD001-0061 GEAR HEAD BH6G2-30RH
92384 190203-114 MAIN SHUTTER MAIN SHUTTER
80674 CY001-0051 AC SERVO AMPLIFIER MR-J4-10A
40031 BF001-0294 STEPPING MOTOR PK266-02B
40005 BF001-0268 DRIVER IMS50-210
50230 CQ001-0039 FIBER SENSOR AMPLIFIER E3NX-FA11
41471 BG002-0307 ANALOG OUTPUT BOARD 0660-01515
7553 AA002-0010 AC SERVO DRIVER MADDT1205
32012 AR001-1031 POWER SUPPLY UNIT Q61P
40025 BF001-0288 STEPPING MOTOR PK566BW
92381 190203-111 CONDENSER LENS CONDENSER LENS
80684 CY001-0061 AC SERVO AMPLIFIER MR-J4-10A
106748 FM001-0932 POWER SUPPLY UNIT Q61P-A1
50932 CO001-0290 GEAR HEAD K9005R B
80677 CY001-0054 AC SERVO AMPLIFIER MR-J4-10A
106749 FM001-0933 POWER SUPPLY UNIT Q61P-A1
109608 FY002-0109 RELAY H-CT-A-P
30044 AQ001-0702 INPUT UNIT AX42
38691 BD001-0119 AC SERVO AMPLIFIER MR-J3-70B
41468 BG002-0304 ANALOG OUTPUT BOARD 0660-01515
7549 AA002-0006 AC SERVO DRIVER MADDT1205
92380 190203-110 UV LAMP TARGET UV LAMP TARGET
7548 AA002-0005 AC SERVO DRIVER MBDDT2210
50229 CQ001-0038 PHOTO MICRO SENSOR EE-SY672
7551 AA002-0008 AC SERVO DRIVER MCDDT3520
3860 1TA1-9025 STEPPING MOTOR EM569-NAE
7550 AA002-0007 AC SERVO DRIVER MADDT1207
106773 FM001-0957 OUTPUT UNIT AJ65SBTB1-16T
32011 AR001-1030 POWER SUPPLY UNIT Q61P
41466 BG002-0302 ANALOG OUTPUT BOARD 0660-01513
40028 BF001-0291 STEPPING MOTOR PK266-02B
40015 BF001-0278 AC SERVO MOTOR HA-FE13
41473 BG002-0309 ANALOG INPUT BOARD 0660-01514
50172 CP001-0504 AREA SENSOR PJ-F40T
50177 CP001-0509 AREA SENSOR PJ-F41T
50176 CP001-0508 AREA SENSOR PJ-F41T
30042 AQ001-0700 INPUT UNIT AX42
40016 BF001-0279 AC SERVO MOTOR SGM-01A314B
40017 BF001-0280 AC SERVO MOTOR SGM-01A314B
7561 AA002-0018 SERVO PACK SGDV-2R8A01A
106740 FM001-0924 RS-232/RS-422/485 UNIT QJ71C24N
106745 FM001-0929 CPU UNIT Q25HCPU
50933 CO001-0291 GEAR HEAD K9005R B
7563 AA002-0020 SERVO PACK SGDV-2R8A01A
50925 CO001-0283 GEAR HEAD K9005R B
41464 BG002-0300 ANALOG OUTPUT BOARD 0660-01513
30036 AQ001-0694 INPUT UNIT AX42
15020 JA137P-020 RS-232-C UNIT A1SJ71UC24-R2
50927 CO001-0285 GEAR HEAD K9005R B
15015 JA137P-015 INPUT UNIT A1SX42
40024 BF001-0287 MOTOR Α1/3000
32924 AR001-1943 RS-232 UNIT QJ71C24N-R2
106769 FM001-0953 INPUT UNIT AJ65SBTB1-16D
50930 CO001-0288 GEAR HEAD K9005R B
106774 FM001-0958 D/A CONVERTER UNIT AJ65BT-64DAV
106741 FM001-0925 CPU UNIT Q25HCPU
106744 FM001-0928 CPU UNIT Q25HCPU
50937 CO001-0295 GEAR HEAD K9005R B
50926 CO001-0284 GEAR HEAD K9005R B
109611 FY002-0112 RELAY H-CT-A-P
41462 BG002-0298 ANALOG OUTPUT BOARD 0660-01513
50934 CO001-0292 GEAR HEAD K9005R B
109609 FY002-0110 RELAY H-CT-A-P
15016 JA137P-016 OUTPUT UNIT A1SY41
80676 CY001-0053 AC SERVO AMPLIFIER MR-J4-10A
40006 BF001-0269 DRIVER IMS50-210
15033 JA138P-004 INPUT UNIT A1SX41
50175 CP001-0507 AREA SENSOR PJ-F41R
109599 FY002-0100 RELAY H-TIO-B-FK09-V*NN
4002 1TA5-0004 STEPPING MOTOR PK566-NACM-A15
41463 BG002-0299 ANALOG OUTPUT BOARD 0660-01513
106747 FM001-0931 POWER SUPPLY UNIT Q61P-A1
109606 FY002-0107 RELAY H-CT-A-P
106770 FM001-0954 INPUT UNIT AJ65SBTB1-16D
109603 FY002-0104 RELAY H-TIO-B-FK09-V*NN
7565 AA002-0022 AC SERVO DRIVER MADDT1205
109605 FY002-0106 RELAY H-TIO-B-FK09-V*NN
109610 FY002-0111 RELAY H-CT-A-P
15034 JA138P-005 INPUT UNIT A1SX42
15018 JA137P-018 I/O UNIT A1SH42
80663 CY001-0040 AC SERVO AMPLIFIER MR-J4-10A
109600 FY002-0101 RELAY H-TIO-B-FK09-V*NN
80759 CY001-0136 AC SERVO AMPLIFIER MR-J4-20A
80652 CY001-0029 AC SERVO AMPLIFIER MR-J4-10A
80750 CY001-0127 AC SERVO AMPLIFIER MR-J4-20A
80654 CY001-0031 AC SERVO AMPLIFIER MR-J4-10A
109601 FY002-0102 RELAY H-TIO-B-FK09-V*NN
15030 JA138P-001 POWER SUPPLY UNIT A1S61P
109602 FY002-0103 RELAY H-TIO-B-FK09-V*NN
80653 CY001-0030 AC SERVO AMPLIFIER MR-J4-10A
80763 CY001-0140 AC SERVO AMPLIFIER MR-J4-20A
80753 CY001-0130 AC SERVO AMPLIFIER MR-J4-20A
80664 CY001-0041 AC SERVO AMPLIFIER MR-J4-10A
80662 CY001-0039 AC SERVO AMPLIFIER MR-J4-10A
80762 CY001-0139 AC SERVO AMPLIFIER MR-J4-20A
80758 CY001-0135 AC SERVO AMPLIFIER MR-J4-20A
109597 FY002-0098 RELAY H-TIO-B-FK09-V*NN
80756 CY001-0133 AC SERVO AMPLIFIER MR-J4-20A
80764 CY001-0141 AC SERVO AMPLIFIER MR-J4-20A
110222 GS001-0270 CMP pad IC1000
104952 FI001-0208 5-phase stepping motor PK525HPB
104994 FI001-0250 POSITION CONTROLLER SCON-CA-200I-CC-0-2
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Customer Information

Note: We do not accept transactions with individuals or sole proprietors.

RequiredInquiry Category
RequiredCompany Name
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RequiredYour Name Example: John Smith
OptionalPhone Number Example: 080-0000-0000
OptionalFax Number Example: 03-0000-0000
RequiredE-mail
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RequiredInquiry Content

Note: Your inquiry cannot be sent unless you agree to these terms.

Personal Information Protection Policy

In the operation of this website, Hightech Systems respects your privacy and endeavors to take due precautions to protect and manage your personal information appropriately.
Hightech Systems Corporation (hereinafter, “Hightech Systems”) manages personal information in accordance with the laws and regulations for the protection of personal information.

Hightech Systems will state the objective of use of the information prior to obtaining personal information, and obtain such information through appropriate and fair means.
Hightech Systems will use your personal information within the scope necessary to achieve the following objectives of use and will manage your information with strict care.

  1. to respond to inquiries received from you
  2. to send e-mail magazines, send direct marketing materials, and so on
  3. Supply any other information believed to be useful to each provider of personal information

Hightech Systems will keep the personal information it obtains accurate and up to date, and manage it securely. At the same time, Hightech Systems may also seek your cooperation to prevent the loss, falsification or leaking of your personal information, or to achieve necessary and appropriate information security measures.

Hightech Systems acknowledges your right to request the disclosure, amendment, cessation of use, or deletion, etc., of your personal information, and if such request is made, Hightech Systems will respond immediately within reason in accordance with applicable laws.
If the objective of use stipulated in these provisions exceeds a reasonable scope, Hightech Systems will present a new objective of use, inform you to this effect, and use the information upon receiving your consent.

If law enforcement, the judiciary or other bodies with legal powers request the disclosure of personal information, Hightech Systems will provide such information to the requesting party.